Simulation and approximation of dependence of the current of the high voltage glow discharge electron gun from the voltage on the coil of electromagnetic valve as the element of a gas-dynamic control system

Authors

  • Igor V. Melnyk Electronic Devices Department, Faculty of Electronics, National Technical University of Ukraine "KPI", Kyiv, Ukraine, Ukraine https://orcid.org/0000-0003-0220-0615
  • Borys A. Tuhai Institute of Applied Electronics, National Technical University of Ukraine "KPI", Kyiv, Ukraine, Ukraine
  • Serhii B. Tuhai The Electronic Devices Department, Faculty of Electronics, National Technical University of Ukraine "KPI", Kyiv, Ukraine, Ukraine https://orcid.org/0000-0001-7646-1979

DOI:

https://doi.org/10.20535/SRIT.2308-8893.2016.3.01

Keywords:

high voltage glow discharge electron gun, gas-dynamic control system of discharge current, electromagnetic valve, proportioning device

Abstract

In the article, the method of numerical calculation of dependence of the current of a high voltage glow discharge electron gun from the parameters of the electromagnetic valve as the element of a gas-dynamic control system is considered. The analytical relation has been obtained which allows to approximate with the high accuracy the dependence of the current of an electron gun from the voltage on the coil of an electromagnetic valve. Obtained results are very interesting to the engineers in the area of designing of electron-beam equipment.

Author Biographies

Igor V. Melnyk, Electronic Devices Department, Faculty of Electronics, National Technical University of Ukraine "KPI", Kyiv, Ukraine

Igor Melnyk,

Associate Professor of National Technical University of Ukraine "KPI", Faculty of Electronics, Electronic Devices Department. Employed at National Technical University of Ukraine "KPI" since 1989 as post-graduate, assistant professor (since 1994) and as an associate professor (since 2004). Doctor of technical science since 2009. Main scientific interests: simulation of electronic systems, electron beam technologies and equipment, materials processing, computer networks.

Borys A. Tuhai, Institute of Applied Electronics, National Technical University of Ukraine "KPI", Kyiv, Ukraine

Borys Tuhai,

Senior Scientist of National Technical University of Ukraine "KPI", Institute of Applied Electronics. Employed at National Technical University of Ukraine "KPI" since 1971 as an engineer, Junior Scientist (since 1982) and as a Senior Scientist (since 2001). Candidate of technical science since 2002.

Main scientific interests: electron beam technologies and equipment, simulation and elaboration of gas-dynamic control systems.

Serhii B. Tuhai, The Electronic Devices Department, Faculty of Electronics, National Technical University of Ukraine "KPI", Kyiv, Ukraine

Serhiy Tuhai,

Assistant Professor of National Technical University of Ukraine "KPI", Faculty of Electronics, Electronic Devices Department. Employed at National Technical University of Ukraine "KPI" since 2010 as post-graduate and as an assistant professor (since 2013).

Candidate of technical science since 2013.

Main scientific interests: electron beam technologies and equipment, simulation and elaboration of gas-dynamic control systems.

References

Novikov A.A. Istochniki elektronov vysokovol'tnogo tlejuschego razrjada s anodnoj plazmoj / A.A. Novikov. — M.: Energoatomizdat, 1983. — 96 s.

Plazmennye protsessy v tehnologicheskih elektronnyh pushkah / M.A. Zav'jalov, Ju.E. Krejndel', A.A. Novikov, L.P. Shanturin. — M.: Atomizdat, 1989. — 256 s.

Ladohin S.V. Elektronno-luchevaja plavka v litejnom proizvodstve / S.V. Ladohin, N.I. Levitskij, V.B. Chernnjavskij i dr. — K.: Stal', 2007. — 605 s.

Feinaeugle P. A new generation of plasma-based electron beam sources with high power density as a novel tool for high-rate PVD, Society of Vacuum Coaters / P. Feinaeugle, G. Mattausch, S. Schmidt, F.H. Roegner // 54-th Annual Technical Conference Proceedings, Chicago. — 2011. — P. 202–209.

Mattausch G. Gas discharge electron sources – proven and novel tools for thin-film technologies / G. Mattausch, B. Zimmermann, F. Fietzke etc. // Elektrotechnica and Electronica (E+E). —2014. — 49, № 5 – 6. — P. 183–195.

Mel'nik I.V. Approksimatsija vol't-ampernyh harakteristik tehnologicheskih istochnikov elektronov vysokovol'tnogo tlejuschego razrjada s ispol'zovaniem sredstv sistemy MatLab / I.V. Mel'nik // Vestn. Hers. nats. tehn. un-ta. — Herson, 2009. — Vyp. 2 (35). — S. 299–305.

Denbnovets'kyj S.V. Modeljuvannja protsesu avtomatychnoho keruvannja strumom hazorozrjadnoho elektropromenevoho nahrivacha / S.V. Denbnovets'kyj, K.O. Kostjuchenko, V.I. Mel'nyk y dr. // Elektronika i svjaz'. —2014. — 9, № 22. — S. 15 – 17.

Denbnovetsky S.V. Model of control of glow discharge electron gun current for microelectronics production applications / S.V. Denbnovetsky, V.I. Melnyk, I.V. Melnyk, B.A. Tugay // Proceedings of SPIE. Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics. — 2013. — Vol. 5065. — P. 64–76.

Mel'nik I.V. Issledovanie propusknoj sposobnosti dozirujuschego ustrojstva natekatelja gaza dlja gazorazrjadnoj elektronnoj pushki / I.V. Mel'nik, S.B. Tugaj // Elektronika i svjaz', № 5 (64), 2011. — S. 25–30.

Pipko A.I. Konstruirovanie i raschet vakuumnyh sistem / A.I. Pipko, V.Ja. Pliskovskij, E.A.Penchko. — M.: Energija, 1979. — 504 s.

Gejntse V. Vvedenie v vakuumnuju tehniku: v 2 t. / V.M. Gejntse. — M.–L.: Gosenergoizdat, 1960. — T. 1. Fizicheskie osnovy vakuumnoj tehniki. — 511 s.

Tjagunov G.A. Osnovy rascheta vakuumnyh sistem / G.A. Tjagunov. — M.–L.: Gosenergoizdat, 1948. — 148 s.

Vasil'ev V.P. Chislennye metody reshenija ekstremal'nyh zadach / V.P. Vasil'ev. — M.: Nauka, 1988. — 552 s.

Bronshtejn I.N. Spravochnik po matematike dlja inzhenerov i uchaschihsja vuzov / I.N. Bronshtejn, K.A. Semendjaev. — M.: Nauka, Gl. red. Fiziko-matemat. lit-ry, 1986. — 723 s.

Published

2016-09-26

Issue

Section

Progressive information technologies, high-efficiency computer systems