Algorithm of calculation of focal parameters of profile electron beams, formed by the gas-discharge electron guns

Authors

  • Igor V. Melnyk The Electronic Devices Department of the Faculty of Electronics of the National Technical University of Ukraine "Igor Sikorsky KPI", Kyiv, Ukraine
  • Alina V. Pochynok The Department of Information Systems and Technologies of Scientific and Education Institute of Information Technology and Management of University of State Fiscal Service of Ukraine, Kyiv, Ukraine

DOI:

https://doi.org/10.20535/SRIT.2308-8893.2019.2.01

Keywords:

minimax analysis, electron free drift model, focal parameters of the electron beam, high voltage glow discharge

Abstract

An algorithm of calculation of the focal distance of a hollow conical electron beam, formed by high voltage glow discharge electron guns, as well as the calculation of the diameter and thickness of a focal ring of such a beam, are considered in the article. The proposed algorithm is based on the model of free moving of electrons in the anode plasma and formed on the base of the laws of electron optics with using the methods of discrete mathematics and minimax analysis. Obtained simulation results allow to find the important regularities, which characterized the dependencies of focal parameters of a hollow conical electron beam, formed by the high voltage glow discharge electron guns, on the constructive parameters of electrodes’ system of the electron gun.

Author Biographies

Igor V. Melnyk, The Electronic Devices Department of the Faculty of Electronics of the National Technical University of Ukraine "Igor Sikorsky KPI", Kyiv

Igor Melnyk,

Doctor of Technical Sciences, a professor at the Electronic Devices Department of the Faculty of Electronics of the National Technical University of Ukraine "Igor Sikorsky KPI", Kyiv, Ukraine.

Main scientific interests: simulation of electronic systems, electron beam technologies and equipment, materials processing.

Alina V. Pochynok, The Department of Information Systems and Technologies of Scientific and Education Institute of Information Technology and Management of University of State Fiscal Service of Ukraine, Kyiv

Alina Pochynok,

Ph.D., an associate professor at the Department of Information Systems and Technologies of Scientific and Education Institute of Information Technology and Management of University of State Fiscal Service of Ukraine, Kyiv, Ukraine.

Main scientific interests: mathematical modelling and creating of computer software for modelling the results of scientific measurements, development of methods and software applications for the mathematical treatment of scientific data.

References

Novikov A.A. Istochniki elektronov vysokovol'tnogo tlejuschego razrjada s anodnoj plazmoj / A.A. Novikov. — M.: Energoatomizdat, 1983. — 96 s.

Plazmennye protsessy v tehnologicheskih elektronnyh pushkah / M.A. Zav'jalov , Ju.E. Krejndel', A.A. Novikov, L.P. Shanturin. — M.: Atomizdat, 1989. — 256 s.

Ladohin S.V. Elektronno-luchevaja plavka v litejnom proizvodstve / S.V. Ladohin, N.I. Levitskij, V.B. Chernnjavskij i dr. — K.: Stal', 2007. — 605 s.

Feinaeugle P. A new generation of plasma-based electron beam sources with high power density as a novel tool for high-rate PVD / P. Feinaeugle, G. Mattausch, S. Schmidt, F.H. Roegner // Society of Vacuum Coaters, 54-th Annual Technical Conference Proceedings, Chicago. — 2011. — P. 202–209.

Mattausch G. Gas discharge electron sources – proven and novel tools for thin-film technologies / G. Mattausch, B. Zimmermann, F. Fietzke et al. // Elektrotechnica and Electronica (E+E). — 2014. — Vol. 49, N 5–6. — P. 183–195.

Grechanyuk M.I. Modern electron beam technologies and equipment for melting and physical vapor deposition of different materials / M.I. Grechanyuk, A.G. Melnyk, I.M. Grechanyuk et al. // Elektrotechnica and Electronica (E+E). — 2014. — Vol. 49, N 5–6. — P. 115–121.

Denbnovetsky S.V. High voltage glow discharge electron sources and possibilities of its application in industry for realising of different technological operations / S.V. Denbnovetsky, V.G. Melnyk, I.V. Melnyk // IEEE Transactions on plasma science. — 2003. — Vol. 31, N 5. — P. 987–993.

Melnik I.V. Simulation of geometry of high voltage glow discharge electrodes’ systems, formed profile electron beams / I.V. Melnik // Proceedings of SPIE, Vol. 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics. — P. 627809-1 – 627809-13.

Rykalin N.N. Osnovy elektronno-luchevoj obrabotki materialov / N.N. Rykalin, I.V. Zuev, A.A. Uglov. — M.: Mashinostroenie, 1978. — 239 s.

Mel'nik I.V. Chislennoe modelirovanie raspredelenija elektricheskogo polja i traektorij chastits v istochnikah elektronov na osnove vysokovol'tnogo tlejuschego razrjada / I.V. Mel'nik // Izvestija vysshih uchebnyh zavedenij. Radioelektronika. — 2005. — T. 48. — № 6. — S. 61–71.

Mel'nik I.V. Metodika modelirovanija tehnologicheskih istochnikov elektronov vysokovol'tnogo tlejuschego razrjada / I.V. Mel'nik, S.B. Tugaj // Elektronnoe modelirovanie. — 2010. — T. 32. — № 6. — S. 31–43.

Mel'nik I.V. Issledovanie elektronno-ionnoj optiki elektrodnyh sistem vysokovol'tnogo tlejuschego razrjada s ispol'zovaniem metodov komp'juternogo analiza zobrazhenij / I.V. Mel'nik // Elektronnoe modelirovanie. — 2007. — T. 29, № 1. — S. 45–58.

Il'in V.P. Chislennye metody reshenija zadach elektrofiziki / V.P. Il'in. — M.: Nauka, 1985. — 336 s.

Mel'nyk I.V. Systema naukovo-tekhnichnykh rozrakhunkiv MatLab ta yiyi vykorystannja dlja rozv’jazannja zadach iz elektroniky: navch. posib.; u 2-kh t. / I.V. Mel'nyk // T. 1. Osnovy roboty ta funktsiyi systemy. — K.: Un-t "Ukrayina", 2009. — 507 s.

Mel'nyk I.V. Systema naukovo-tekhnichnykh rozrakhunkiv MatLab ta yiyi vykorystannja dlja rozv’jazannja zadach iz elektroniky: navch. posib.; u 2-kh t. / I.V. Mel'nyk // T. 2. Osnovy prohramuvannja ta rozv’jazannja prykladnykh zadach. — K.: Un-t "Ukrayina", 2009. — 327 s.

Mel'nik I.V. Ispol'zovanie parallel'nyh vychislenij dlja modelirovanija tehnologicheskih gazorazrjadnyh istochnikov elektronov / I.V. Mel'nik, A.O. Luntovskij // Elektronnoe modelirovanie. — 2016. — T. 38. — № 3. — S. 5–21.

Molokovskij S.I. Intensivnye elektronnye i ionnye puchki / S.I. Molokovskij, D.I. Sushkov. — M.: Energoatomizdat, 1991. — 304 s.

Silad'i M. Elektronnaja i ionnaja optika / M. Silad'i. — M.: Mir, 1990. — 640 s.

Anderson D. Dyskretnaja matematyka y kombinatoryka / D. Anderson. — M.: Izdatel'skij dom "Vil'jams", 2004. — 960 s.

Vasil'ev V.P. Chislennye metody reshenija ekstremal'nyh zadach: ucheb. posobie dlja vuzov / V.P. Vasil'ev. — M.: Nauka. Gl. red. fiz-mat. lit., 1988. — 552 s.

Samarskij A.A. Chislennye metody / A.A. Samarskij, A.V. Gulin. — M.: Nauka, 1989. — 432 s.

Published

2019-06-25

Issue

Section

Progressive information technologies, high-efficiency computer systems